Magnetically Levitated Molecular Pump
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GMR Series Multistage Roots Dry Vacuum Pump
GMR series dry pumps can be used in clean processes and general demanding processes; High reliability and extremely low operating cost;
Mainly suitable for etching and ion implantation process chambers in the semiconductor industry;
Low energy consumption, corrosion resistance, and small footprint.
CategoryIndustrial Equipment & Components
● GMR series dry pumps can be used in clean processes and general demanding processes; High reliability and extremely low operating cost;
● Mainly suitable for etching and ion implantation process chambers in the semiconductor industry;
● Low energy consumption, corrosion resistance, and small footprint.
Application Challenges and Application Areas
| Process | Condensation | Corrosion | Recommended Products | Remark |
| IMP source | ● | GMR | ||
| Strip/Ashing | GMR | |||
| Oxide Etch | ● | GMR | ||
| Poly Etch | ● | GMR | ||
| Metal Etch | ● | ● | GMR | For 6-inch and 8-inch Fab |
| HDP | ● | GMR |
Technical Specifications
| Model | Maximum Pumping Speed | Ultimate Pressure | Inlet Port Diameter | Exhaust Port Diameter | Supply Voltage | Rated power | Operating Power | Cooling Water | Nitrogen | Weight | Noise |
| （m3/h） | (mbar) | （ISO） | （NW） | （V） | （kW） | （kW） | （L/min） | （slm） | （kg） | dB(A) | |
| GMR200 | 210 | ＜1×10-2 | 63 | 25 | 208/380 | 1.9 | 0.7 | 1.9 | 20-40 | 140 | ＜63 |
| GMR600 | 630 | ＜5×10-3 | 100 | 25 | 208/380 | 4.8 | 0.8 | 2 | 20-40 | 203 | ＜63 |
| GMR1200 | 1100 | ＜5×10-3 | 100 | 25 | 208/380 | 4.8 | 1 | 2 | 20-40 | 203 | ＜63 |
| GMR1800 | 1800 | ＜5×10-3 | 100 | 40 | 208/380 | 6.5 | 1.7 | 3.6 | 20-90 | 350 | ＜63 |
Dimensions
| Model | Length（mm） | Width（mm） | Height（mm） |
| GMR200 | 695 | 290 | 434 |
| GMR600 | 685 | 275 | 706 |
| GMR1200 | 685 | 275 | 706 |
| GMR1800 | 901 | 390 | 780 |
Pumping Speed Curve
Price and availability are provided on request. Please contact the supplier to confirm the required configuration.
| Supplier | Grand Hitek (Beijing) |
| Category | Industrial Equipment & Components |
| Price | Contact for price |
| SKU | GHT-P8 |
| Model | GMR200, GMR600, GMR1200, GMR1800 |
| Brand | Grand Hitek |
| Product Type | Dry Vacuum Pump |
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