Megrez Integrated Plasma Vacuum System

Megrez is a plasma integrated machine developed by Grand Hitek for WN and some heavy SiO2 dust processes (HARP, PE-TEOS, etc.);

Integrating the plasma generator and vacuum pump into one system can safely and efficiently extend the service life of dry pumps in related processes.

CategoryIndustrial Equipment & Components

● Megrez is a plasma integrated machine developed by Grand Hitek for WN and some heavy SiO₂ dust processes (HARP, PE-TEOS, etc.);

● Integrating the plasma generator and vacuum pump into one system can safely and efficiently extend the service life of dry pumps in related processes.

Technical specifications

Parameters	Measurement Unit‌	Megrez
Integrated Vacuum Pump Model	/	GHC5000T
Ultimate Pressure	mbar	5×10^-3
Inlet Port Diameter	/	ISO100
Exhaust Port Diameter	/	NW40
Maximum Pumping Speed	m³/h	7000
Supply Voltage	V	220
KVA	/	36.8
Full Load Current	FLA	102
Cooling Water	L/min	18
Nitrogen	slm	96/133
Weight	kg	650
Noise	dB(A)	＜75
Length	mm	1300
Width	mm	710
Height	mm	1981

Pumping Speed Curve

Megrez Integrated Plasma Vacuum System — manufacturer illustration

Price and availability are provided on request. Please contact the supplier to confirm the required configuration.

Supplier	Grand Hitek (Beijing)
Category	Industrial Equipment & Components
Price	Contact for price
SKU	GHT-P39
Brand	Grand Hitek
Product Type	Integrated Vacuum System

Megrez Integrated Plasma Vacuum System

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