GHC Series New Integrated Claw Dry Vacuum Pump

GHC series dry pumps can be used in clean processes, general processes and harsh process applications. They have strong dust handling capabilities and are the first choice for harsh process applications. They have high reliability and extremely low operating cost;

Suitable for diversified markets and widely used in semiconductor, advanced displays and other industries.

CategoryIndustrial Equipment & Components

● GHC series dry pumps can be used in clean processes, general processes and harsh process applications. They have strong dust handling capabilities and are the first choice for harsh process applications. They have high reliability and extremely low operating cost;

● Suitable for diversified markets and widely used in semiconductor, advanced displays and other industries.

Application Challenges and Application Areas

Process	Condensation	Corrosion	Dust	Thermal Reaction	Combustible Gas Pumping	Recommended Products
ALD	●	●	●	●	●	GHC
PECVD	●	●	●		●	GHC
LPCVD	●	●	●		●	GHC
SACVD	●		●	●	●	GHC
MOCVD	●			●	●	GHC
Metal Etch	●	●				GHC

Technical Specifications

Model	Maximum Pumping Speed	Ultimate Pressure	Inlet Port Diameter	Exhaust Port Diameter	Supply Voltage	Rated power	Operating Power	Cooling Water	Nitrogen	Weight	Noise
Model	(m³/h)	(mbar)	(ISO)	(NW)	（V）	（kW）	（kW）	(L/min)	（slm）	（kg）	dB(A)
GHC200	220	＜2×10^-2	100	40	208/380	7.5	2.7	2.7	20-40	265	＜70
GHC500	510	＜2×10^-2	100	40	208/380	11	6	6	40-90	360	＜70
GHC600	680	＜5×10^-3	100	40	208/380	12	4.1	3	40-90	467	＜70
GHC1200	1250	＜5×10^-3	100	40	208/380	12	4.6	4.2	40-90	467	＜70
GHC1800	1850	＜5×10^-3	160	40	208/380	12	4.9	4.7	40-90	500	＜70
GHC3000	3200	＜5×10^-3	160	40	208/380	18.5	7.8	11	40-130	853	＜70
GHC5000	4480	＜5×10^-3	200	40	208/380	18.5	9.3	11	40-130	905	＜70
GHC6000	5500	＜5×10^-3	250	40	208/380	18.5	9.3	11	40-130	945	＜70

Dimensions

Model	Length（mm）	Width（mm）	Height（mm）
GHC200	1150	442	519
GHC500	1196	580	617
GHC600	901	396	790
GHC1200	901	396	790
GHC1800	901	396	787
GHC3000	1000	517	970
GHC5000	1000	517	970
GHC6000	1100	517	970

Pumping Speed Curve

GHC Series New Integrated Claw Dry Vacuum Pump — manufacturer illustration

Price and availability are provided on request. Please contact the supplier to confirm the required configuration.

Supplier	Grand Hitek (Beijing)
Category	Industrial Equipment & Components
Price	Contact for price
SKU	GHT-P131
Model	GHC200, GHC500, GHC600, GHC1200, GHC1800, GHC3000, GHC5000, GHC6000
Brand	Grand Hitek
Product Type	Dry Vacuum Pump

GHC Series New Integrated Claw Dry Vacuum Pump

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