Phecda Integrated Single-Pump Vacuum System

● Phecda is an integrated single-pump integrated module for Diffusion, EPI, MOCVD and other processes, including dry vacuum pumps and exhaust gas abatement system.

Features

Safe and reliable:

● Passed SEMI S2/S6/S8/F47 certification to ensure safe operation;

● Anti-backfire design to curb flame reflux;

● Real-time monitoring of dedicated energetic gas to ensure safety;

● System-wide pressure leak detection to avoid local leakage;

● It has explosion-proof function to avoid the evacuation of the entire plant and ensure the safety of personnel and equipment.

Stable operation:

● Adopting the overall BKM setting, it is easy to realize system-level linkage, reduce dust backflow and wafer scrapping, and effectively improve MTBF;

● Significantly shorten the pump to exhaust gas abatement pipeline, reasonably control the temperature, avoid condensation blockage, and fundamentally reduce the risk of explosion.

Predictive maintenance to reduce TCO:

● Early warning and predictive maintenance reduce Wafer scrapping losses caused by abnormal downtime;

● Reduce the frequency of spare parts damage, effectively reducing COO.

Smaller footprint:

● Modular design, the area occupied by a single machine is 16%+ saved compared with competing products.