Magnetically Levitated Molecular Pump
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The GS series dry pump can be used in clean processes, general processes and harsh process applications, and has high reliability and extremely low operating cost;
Suitable for diversified markets, widely used in solar PV, etc.
● The GS series dry pump can be used in clean processes, general processes and harsh process applications, and has high reliability and extremely low operating cost;
● Suitable for diversified markets, widely used in solar PV, etc.
Application Challenges and Application Areas
| Category | Process | Condensation | Pyrolysis | Dust | Recommended Products |
| Crystal Pulling | Crystal Pulling | ● | GS-S Series | ||
| Cells | PECVD | ● | GS Series | ||
| ALD | ● | ● | GS Series | ||
| LPCVD | ● | GS Series |
Technical Specifications
| Model | Maximum Pumping Speed | Ultimate Pressure | Inlet Port Diameter | Exhaust Port Diameter | Supply Voltage | Rated power | Operating Power | Cooling Water | Nitrogen | Weight | Noise |
| (m3/h) | (mbar) | (ISO) | (NW) | (V) | (kw) | (KW) | (L/m) | (slm) | (kg) | dB(A) | |
| GS1800 | 1800 | <5×10-3 | 160 | 40 | 380-480 | 12 | 3.5 | 7 | 40-90 | 503 | <70 |
| GS1800H | 1800 | <5×10-3 | 160 | 40 | 380-480 | 12 | 4.7 | 7 | 40-90 | 500 | <70 |
| GS2000E | 2000 | <5×10-3 | 160 | 40 | 380-480 | 12 | 3.5 | 7 | 40-90 | 488 | <70 |
| GS2400E | 2400 | <5×10-3 | 160 | 40 | 380-480 | 18.5 | 5.6 | 12 | 40-90 | 865 | <70 |
| GS3000 | 3300 | <5×10-3 | 160 | 40 | 380-480 | 18.5 | 7.3 | 12 | 40-90 | 865 | <70 |
| GS3600E | 3600 | <5×10-3 | 160 | 40 | 380-480 | 18.5 | 7 | 12 | 40-90 | 865 | <70 |
| GS4200S | 4200 | <1×10-3 | 200 | 40 | 380-480 | 12 | 4 | 7-15 | 5-60 | 740 | <75 |
| GS5000 | 4480 | <5×10-3 | 200 | 40 | 380-480 | 18.5 | 7.3 | 12 | 40-90 | 948 | <70 |
| GS6000 | 5500 | <5×10-3 | 250 | 40 | 380-480 | 18.5 | 7.3 | 12 | 40-90 | 948 | <70 |
Dimensions
| Model | Length(mm) | Width(mm) | Height(mm) |
| GS1800 | 1020 | 442 | 787 |
| GS1800H | 1020 | 442 | 787 |
| GS2000E | 900 | 442 | 787 |
| GS2400E | 1125 | 517 | 969 |
| GS3000 | 1125 | 517 | 969 |
| GS3600E | 1125 | 517 | 969 |
| GS4200S | 1220 | 584 | 974 |
| GS5000 | 1240 | 580 | 966 |
| GS6000 | 1125 | 517 | 969 |
Pumping Speed Curve


Price and availability are provided on request. Please contact the supplier to confirm the required configuration.
| Supplier | Grand Hitek (Beijing) |
| Category | Industrial Equipment & Components |
| Price | Contact for price |
| SKU | GHT-P7 |
| Model | GS1800, GS1800H, GS2000E, GS2400E, GS3000, GS3600E, GS4200S, GS5000, GS6000 |
| Brand | Grand Hitek |
| Product Type | Dry Vacuum Pump |