Precision Cleaning of Semiconductor Parts
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Merak Dual-Deck Multi-Pump Integrated Vacuum System
Merak is a dual-deck multi-pump integrated module with a modular design that can flexibly integrate various types of vacuum pumps, chillers and other equipment. It supports adding or removing modules on demand, greatly simplifying the space of the wafer factory and increasing the output per unit area;
It is suitable for various processes such as semiconductor Etch and PVD, significantly reducing Hookup costs and Facility point requirements, greatly shortening installation time, and helping wafer factories simplify design, rapid deployment, and safe operations.
CategoryIndustrial Equipment & Components
● Merak is a dual-deck multi-pump integrated module for ALD WN and heavy SiO dust processes in the semiconductor industry;
● Passed SEMI S2/S22/F47 certification to ensure safe operation; The equipment can withstand earthquakes of magnitude 8, creating extreme safety for the Fab;
● Integrated water, electricity and gas distribution panel design reduces Facility POC point requirements and hookup costs;
● Double-layer stacked arrangement, can integrate up to 8 vacuum pumps, greatly simplifying the equipment footprint;
● Flexible increase or decrease of equipment modules and quantity; Compatible with many ancillary equipment, supports integration of mainstream vacuum pumps, Chiller, Trap, etc.;
● Unified management, factory prefabricated installation, significantly shortening startup time.
When Merak is not used, the equipment occupies a larger space.
When Merak is used, the equipment occupies a larger space by more than 50%.
Price and availability are provided on request. Please contact the supplier to confirm the required configuration.
| Supplier | Grand Hitek (Beijing) |
| Category | Industrial Equipment & Components |
| Price | Contact for price |
| SKU | GHT-P37 |
| Brand | Grand Hitek |
| Product Type | Integrated Vacuum System |
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