GLR-P Series Multistage Roots Dry Vacuum Pump
GLR series dry pumps can be used in clean processes and general processes, with high reliability and extremely low operating cost;
Suitable for diversified markets, widely used in semiconductor, advanced displays, LED, lithium-ion battery and solar PV industries.
● GLR series dry pumps can be used in clean processes and general processes, with high reliability and extremely low operating cost;
● Suitable for diversified markets, widely used in semiconductor, advanced displays, LED, lithium-ion battery and solar PV industries.
Application Challenges and Application Areas
| Category | Process | Condensation | Pyrolysis | Dust | Recommended Products |
| Module | Lamination | ● | GLR-P Series |
Technical Specifications
| Model | Maximum Pumping Speed | Ultimate Pressure | Inlet Port Diameter | Exhaust Port Diameter | Supply Voltage | Rated power | Operating Power | Cooling Water | Nitrogen | Weight | Noise |
| (m3/h) | (mbar) | (ISO) | (NW) | (V) | (kw) | (KW) | (L/m) | (slm) | (kg) | dB(A) | |
| GLR3000P | 3380 | <7×10-3 | 160 | 50 | 208/380 | 26 | 6.7 | 6 | 7-100 | 820 | <70 |
| GLR5000 | 4500 | <8×10-3 | 160 | 50 | 380 | 30 | 7.5 | 6 | 4-12 | 900 | <80 |
Dimensions
| Model | Length(mm) | Width(mm) | Height(mm) |
| GLR3000P | 1310 | 620 | 1002 |
| GLR5000 | 1310 | 620 | 1002 |
Pumping Speed Curve


Model information
The manufacturer lists GLR3000P and GLR5000 in the GLR-P series specification tables. The second model is shown without a P suffix in the source; please confirm the exact configuration with the supplier.
Price and availability are provided on request. Please contact the supplier to confirm the required configuration.
| Supplier | Grand Hitek (Beijing) |
| Category | Industrial Equipment & Components |
| Price | Contact for price |
| SKU | GHT-P36 |
| Model | GLR3000P, GLR5000 |
| Brand | Grand Hitek |
| Product Type | Dry Vacuum Pump |



