Mizar Integrated Vacuum System

Mizar pump group is an integrated stacked pump system. The system adopts a mechanical booster pump-mechanical booster pump-dry pump structure. It can be used in clean processes, general processes and harsh process applications, and has high reliability and low operating cost.

CategoryIndustrial Equipment & Components

● Mizar pump group is an integrated stacked pump system. The system adopts a mechanical booster pump-mechanical booster pump-dry pump structure. It can be used in clean processes, general processes and harsh process applications, and has high reliability and low operating cost.

Application Callenges and Solutions

Process	High-flow H₂（＞100slm）	Thermal Decomposition	Recommended Products
HJT PECVD a-Si	●	●	Mizar
ALD	●	●	Mizar

Technical Specifications

Specifications	Measurement Unit	Mizar
Structure	/	Stacked
Pump on	/	GMB6000
Pump down	/	GS3000
LengthWidthHeight	mm	15258001662
Maximum Pumping Speed	m³/h	7000
Ultimate Pressure	mbar	＜5×10^-4
Inlet Port Diameter	/	ISO250
Exhaust Port Diameter	/	NW40
Supply Voltage	/	380-480V-3Ø-50/60Hz-3W+Gnd/PE
Rated Power	kw	7.5+18.5
Operating Power	kw	1.9+7.3
Cooling Water Flow	lpm	15
Nitrogen Flow	slm	96/133
Maximum Noise	dB(A)	＜75
Weight	kg	1450

Pumping Speed Curve

Mizar Integrated Vacuum System — manufacturer illustration

Price and availability are provided on request. Please contact the supplier to confirm the required configuration.

Supplier	Grand Hitek (Beijing)
Category	Industrial Equipment & Components
Price	Contact for price
SKU	GHT-P41
Brand	Grand Hitek
Product Type	Integrated Vacuum System

Mizar Integrated Vacuum System

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