Mizar Integrated Vacuum System
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Semiconductor Industry Y2O3 Coating
Y2O3 Coating is used for surface coating of semiconductor DRY ETCH equipment, which can effectively absorb pollutants in the process; It has excellent properties such as etching resistance and wear resistance, which can extend the service life of equipment spare parts and reduce the cost for customers to replace equipment spare parts.
CategoryIndustrial Equipment & Components
Y2O3 Coating is used for surface coating of semiconductor DRY ETCH equipment, which can effectively absorb pollutants in the process; It has excellent properties such as etching resistance and wear resistance, which can extend the service life of equipment spare parts and reduce the cost for customers to replace equipment spare parts.
PRODUCT MODEL：INNER LINER，UPPER ELECTRODE，GAS INTECTOR
Price and availability are provided on request. Please contact the supplier to confirm the required configuration.
| Supplier | Grand Hitek (Beijing) |
| Category | Industrial Equipment & Components |
| Price | Contact for price |
| SKU | GHT-P136 |
| Brand | Grand Hitek |
| Product Type | Precision Regenerative Coating |
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