GHR Series Multistage Roots Dry Vacuum Pump
Contact for price
GLR Series Multistage Roots Dry Vacuum Pump
GLR series dry pumps can be used in clean processes and general processes, with high reliability and extremely low operating cost;
Suitable for diversified markets, widely used in semiconductor, advanced displays, LED, lithium-ion battery and solar PV industries.
CategoryIndustrial Equipment & Components
● GLR series dry pumps can be used in clean processes and general processes, with high reliability and extremely low operating cost;
● Suitable for diversified markets, widely used in semiconductor, advanced displays, LED, lithium-ion battery and solar PV industries.
Application Challenges and Application Areas
| Process | Condensation | Recommended Products | |
| loadlock | GLR | ||
| Transfer | GLR | ||
| PVD | GLR | ||
| Coater | ● | GLR | |
Technical Specifications
| Model | Maximum Pumping Speed | Ultimate Pressure | Inlet Port Diameter | Exhaust Port Diameter | Supply Voltage | Rated power | Operating Power | Cooling Water | Nitrogen | Weight | Noise |
| （m3/h） | (mbar) | （ISO） | （NW） | （V） | （kw） | （KW） | （L/m） | （slm） | （kg） | dB(A) | |
| GLR120 | 110 | ＜3×10-2 | 63 | 25 | 208/380 | 2.2 | 0.45 | 1.5 | 0-12 | 69 | ＜60 |
| GLR500 | 500 | ＜1×10-2 | 63 | 50 | 208/380 | 15 | 5.7 | 6 | 7-100 | 350 | ＜70 |
| GLR2000 | 2300 | ＜7×10-3 | 160 | 50 | 208/380 | 26 | 6.7 | 6 | 7-100 | 750 | ＜70 |
| GLR3000 | 3380 | ＜7×10-3 | 160 | 50 | 208/380 | 26 | 6.7 | 6 | 7-100 | 820 | ＜70 |
| GLR3500 | 3500 | ＜5×10-3 | 160 | 50 | 380 | 26 | 9.5 | 6 | 4-50 | 820 | ＜75 |
| GLR5000 | 4500 | ＜8×10-3 | 160 | 50 | 380 | 30 | 7.5 | 6 | 4-12 | 900 | <80 |
Dimensions
| Model | Length（mm） | Width（mm） | Height（mm） |
| GLR120 | 448 | 230 | 275 |
| GLR500 | 1310 | 620 | 682 |
| GLR2000 | 1310 | 620 | 1002 |
| GLR3000 | 1310 | 620 | 1002 |
| GLR3500 | 1310 | 620 | 1002 |
| GLR5000 | 1310 | 620 | 1002 |
Pumping Speed Curve
Price and availability are provided on request. Please contact the supplier to confirm the required configuration.
| Supplier | Grand Hitek (Beijing) |
| Category | Industrial Equipment & Components |
| Price | Contact for price |
| SKU | GHT-P17 |
| Model | GLR120, GLR500, GLR2000, GLR3000, GLR3500, GLR5000 |
| Brand | Grand Hitek |
| Product Type | Dry Vacuum Pump |
Related products
More products from verified suppliers
Merak Dual-Deck Multi-Pump Integrated Vacuum System
Contact for price
Panel Display Industry Y2O3 Coating
Contact for price
Phecda Integrated Single-Pump Vacuum System
Contact for price