Magnetically Levitated Molecular Pump

Due to the advantages of no contact, no friction, no need for lubrication and no maintenance, magnetic bearings can meet the stringent requirements for bearings of high-clean, high-vacuum molecular pumps;

The magnetic levitation molecular pump can achieve five degrees of freedom active control to make the rotor operate stably at any angle, and can be installed in all directions;

The magnetic bearing system itself has a displacement sensor, which makes it easy to achieve online dynamic balancing of the rotor;

By controlling the unbalance of the magnetic bearing rotor, the rotor rotates around its inertia main axis, reducing the same-frequency vibration caused by the rotor rotation;

The complete magnetic bearing fault diagnosis method reduces the risk of product failure and extends the service life of the product.

CategoryIndustrial Equipment & Components

● Due to the advantages of no contact, no friction, no need for lubrication and no maintenance, magnetic bearings can meet the stringent requirements for bearings of high-clean, high-vacuum molecular pumps;

● The magnetic levitation molecular pump can achieve five degrees of freedom active control to make the rotor operate stably at any angle, and can be installed in all directions;

● The magnetic bearing system itself has a displacement sensor, which makes it easy to achieve online dynamic balancing of the rotor;

● By controlling the unbalance of the magnetic bearing rotor, the rotor rotates around its inertia main axis, reducing the same-frequency vibration caused by the rotor rotation;

● The complete magnetic bearing fault diagnosis method reduces the risk of product failure and extends the service life of the product.

Application equipment: etching machine, metal deposition system, silicon epitaxial system, PVD, CVD, SiC crystal growth system, etc.

Technical Specifications

Model	GTP-M2201		GTP-M3400		GTP-M4500
sub-category	GTP-M2201	GTP-M2201C	GTP-M3400 C(V)	GTP-M3400 B(V)	GTP-M4500 C(V)
Inlet port flange size	VG200/IS0200F/ ICF253	VG250/IS0250F/ ICF305	VG250/ISO250F/ ICF305	VG300/ISO320F/ VG350	VG300	ISO320F
Exhaust port flange size	KF40		KF40		KF40
N₂pumping speed (L/s)	1850	2200	2700	3200	3800	4000
Ar pumping speed (L/s)	1650	2000	2400	2800	2700
Compression ratio N₂/ Ar	＞10⁷		>108		>108
Ultimate pressure （Pa（Torr））	10^-7（10^-9）[After baking]		10-7 (10-9) [After baking]		10-7 (10-9) [After baking]
Allowable front stage pressure （Pa）	255		255		255
Maximum N₂ flow （SCCM）	1300		2400		2200
Maximum Ar flow （SCCM）	700		1700		1900
Rated speed (rpm)	36500		27600		24000
Standby speed (rpm)	approximately 6000		5000		5000
Start time (min)	≤8		≤10		≤13
Stop time (min)	≤9		≤16		≤21
Cooling method	water cooling		water cooling		water cooling
Noise （dB）	55		55		55
Installation time and angle	arbitrary		arbitrary		arbitrary
Input voltage (V)	200-240		200-240		200-240
Maximum input power without TMS	750（VA）		1500（VA）		1700（VA）
Maximum input power with TMS	1050（VA）		1850（VA）		2250（VA）
Weight （kg）	45		80	83	109/111	105/111

Pumping Speed Curve

Magnetically Levitated Molecular Pump — manufacturer illustration

Price and availability are provided on request. Please contact the supplier to confirm the required configuration.

Supplier	Grand Hitek (Beijing)
Category	Industrial Equipment & Components
Price	Contact for price
SKU	GHT-P16
Model	GTP-M2201, GTP-M2201C, GTP-M3400 C(V), GTP-M3400 B(V), GTP-M4500 C(V)
Brand	Grand Hitek
Product Type	Molecular Pump

Magnetically Levitated Molecular Pump

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